发明名称 Semiconductor device, method of fabricating same, and, electrooptical device
摘要 A pair of substrates forming the active matrix liquid crystal display are fabricated from resinous substrates having transparency and flexibility. A thin-film transistor has a semiconductor film formed on a resinous layer formed on one resinous substrate. The resinous layer is formed to prevent generation of oligomers on the surface of the resinous substrate during formation of the film and to planarize the surface of the resinous substrate.
申请公布号 US2004183076(A1) 申请公布日期 2004.09.23
申请号 US20040815653 申请日期 2004.04.02
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 YAMAZAKI SHUNPEI;ARAI YASUYUKI;TERAMOTO SATOSHI
分类号 G02F1/136;G02F1/13;G02F1/1333;G02F1/1362;G02F1/1368;H01L21/00;H01L21/84;H01L29/78;H01L29/786;(IPC1-7):H01L31/036 主分类号 G02F1/136
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