| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem that, in case a transparent conductive film is formed by a sputtering method, a molecular structure of an organic thin film is destroyed (bond-break) by scattering and collision of recoil Ar ions,γelectrons, target particles or the like which are high-energy particles to degrade a light emission potential that an organic light-emitting material intrinsically has. SOLUTION: In the transparent conductive film forming method providing a mask on a substrate and pattern-forming the transparent conductive film on the substrate by the sputtering method, a trap electrode equipped with a pin made of a magnet is provided between the target and the substrate, and the transparent conductive film made of a target-forming material is pattern-formed on the substrate by the sputtering method. COPYRIGHT: (C)2008,JPO&INPIT
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