| 摘要 |
PROBLEM TO BE SOLVED: To provide an observation sample manufacturing method for rapidly manufacturing an observation sample, the cross section of which is accurately observed, in large quantities by a simple method, and to provide the observation sample. SOLUTION: A ruled line 10a is formed on the surface on the side of the metal film 3 of a sample 10 obtained by forming the metal film 3 on a single crystal substrate 2, and the sample 10 is cleaved along the ruled line 10a while cooled in liquid nitrogen 50. COPYRIGHT: (C)2008,JPO&INPIT
|
