摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an adhesive sheet which achieves both surface smoothness and adhesive layer thin film formation, is therefore little deformed, when the adhesive layer is processed, can be processed in high precision, largely improves product characteristics and productivity, and is useful as a support sheet for processing electronic parts such as small ceramic capacitors, and the like. <P>SOLUTION: The adhesive sheet of the present invention comprises a substrate and a thermally expandable fine spheres-containing adhesive layer or thermally expandable fine spheres-containing resin layer and the adhesive layer, the adhesive layer being laminated to the substrate-opposite side of the resin layer, is characterized in that the thickness of the adhesive layer is 10 to 38μm; the maximum particle diameter of the thermally expandable fine spheres is less than the thickness of the adhesive layer; and a mode diameter is 5 to 30μm. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |