| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a quartz-based optical waveguide that controls an output of light in a fast response in low power consumption. <P>SOLUTION: The quartz-based optical waveguide 1 comprising a Mach-Zehnder interference circuit MZ having two arm parts 3u, 3d formed on a substrate 2, includes: a common waveguide part 7 having both arm parts 3u, 3d; a thin film heater 5 provided above one arm part 3u; and an isolating part 8 isolating and thermally separating a common waveguide part 7 from the substrate 2. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
