| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a gas supply device and method which adjusts a decompression speed of a gas pressure to be supplied to a decompression means for decompressing gas to a predetermined pressure when supply of the gas is cut off. <P>SOLUTION: A regulating valve 26 arranged in a downstream side of the decompression means is controlled so that a pressure of gas to be supplied from a pressure vessel 10 arranged in a downstream side of a gas cut-off means is reduced to the predetermined pressure when the supply of the gas is cut off, and that the decompression speed of the gas pressure to be supplied to the decompression means 24 provided with a rubber member for preventing leaking of gas to the exterior, is lower than a predetermined reference value. <P>COPYRIGHT: (C)2008,JPO&INPIT |
