MICROMECHANICAL HOUSING COMPRISING AT LEAST TWO CAVITIES HAVING DIFFERENT INTERNAL PRESSURE AND/OR DIFFERENT GAS COMPOSITIONS AND METHOD FOR THE PRODUCTION THEREOF
摘要
申请公布号
EP2004542(A1)
申请公布日期
2008.12.24
申请号
EP20070727811
申请日期
2007.04.04
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
发明人
MERZ, PETER;REINERT, WOLFGANG;OLDSEN, MARTEN;SCHWARZELBACH, OLIVER
