| 摘要 |
PROBLEM TO BE SOLVED: To provide an exposure method which, when a belt-shaped workpiece is subjected to exposure treatment, can improve productivity by increasing efficiency of the exposure treatment while ensuring exposure accuracy.SOLUTION: An exposure method includes: an exposure treatment step S13 of irradiating exposure light to a workpiece through a photomask in an exposure treatment part; a positional relationship detecting step S22 of detecting the positional relationship between the workpiece and the photomask in the exposure treatment step S13; a calculation step S23 of obtaining by calculation a moving amount of the photomask in the case of adjusting the positional relationship between the workpiece and the photomask to the target positional relationship therebetween; a workpiece transfer step S11 of transferring the workpiece to the exposure treatment part; and a mask position adjustment step S21 of adjusting the position of the photomask on the basis of the moving amount of the photomask obtained in the calculation step until an area of the workpiece to be subjected to subsequent exposure treatment is transferred to the exposure treatment part.SELECTED DRAWING: Figure 7 |
