LOAD PORT AND METHOD FOR LOADING AND UNLOADING CASSETTE

摘要

A load port for a processing tool includes a carrier, a carrier actuator, an input table, an input table actuator, and a controller. The carrier has a plurality of cassette buffering spaces. The carrier is movable relative to the processing tool. The carrier actuator is operably connected to the carrier. The input table is configured to receive at least one cassette. The input table is movable relative to the carrier. The input table actuator is operably connected to the input table. The controller is configured to control the carrier actuator to move the carrier, such that one of the cassette buffering spaces is aligned with the input table, configured to control the input table actuator to move the input table with the cassette into the aligned cassette buffering space, and configured to control the input table to load the cassette into the aligned cassette buffering space.

主权项

1. A load port for a processing tool, the load port comprising:
a carrier having a plurality of cassette buffering spaces, the carrier being movable relative to the processing tool; a carrier actuator operably connected to the carrier; an input table configured to receive at least one cassette, the input table being movable relative to the carrier; an input table actuator operably connected to the input table; and a controller configured to control the carrier actuator to move the carrier, such that one of the cassette buffering spaces is aligned with the input table, configured to control the input table actuator to move the input table with the cassette into the aligned cassette buffering space, and configured to control the input table to load the cassette into the aligned cassette buffering space.