COMPOUND FOR ENHANCING GENERATION OF CHEMICAL SPECIES

摘要

A reagent that enhances acid generation of a photoacid generator and composition containing such reagent is disclosed.

主权项

1. A compounder comprising a diaryl ketone skeleton, the compounder being characterized by that:
the compounder absorbs a light, the wavelength of which is longer than 220 nm; the compounder is capable of sensitizing a precursor to generate a chemical species from the precursor; and the diaryl ketone skeleton has at least one electron-donating group on at least one aromatic group of the diaryl ketone skeleton.