ION OPTICS COMPONENTS AND METHOD OF MAKING THE SAME

摘要

A method of making an ion optics component includes providing an electrically isolating substrate and machining away material of the substrate from at least one major surface thereof to form features of a first electrode sub-assembly. The formed features include a first surface for supporting integration of a first electrode body and a second surface for supporting integration of a second electrode body. Subsequent plating and masking steps result in the formation of a first electrode body on the first surface and a second electrode body on the second surface. A bridge is integrally formed in the electrically isolating material, so as to electrically isolate the first electrode body from the second electrode body.

主权项

1. A method of making an ion optics component, comprising:
providing an electrically isolating substrate having a first major surface and a second major surface, the second major surface opposite and substantially parallel to the first major surface; machining away material of the substrate from the first major surface to form features of a first electrode sub-assembly comprising a first surface for supporting integration of a first electrode body and a second surface for supporting integration of a second electrode body; and plating and masking the first surface and the second surface of the first electrode sub-assembly to form the first electrode body on the first surface and to form the second electrode body on the second surface, the first electrode body being electrically isolated from the second electrode body, and a line normal to the first electrode body intersecting with a line normal to the second electrode body outside of the substrate.