Method and apparatus for measuring high-frequency electrical characteristics of electronic device, and method for calibrating apparatus for measuring high-frequency electrical characteristics

摘要

A plurality of signal conductors and ground conductors are connected to associated measurement ports of a network analyzer. A short standard is connected between each of the signal conductors and the ground conductor at least three points in the longitudinal direction of each of the signal conductors, and an electrical characteristic is measured. A through chip is connected in series between the signal conductors, and electrical characteristics are measured. Error factors of a measurement system including a transmission line are calculated. An electronic device to be measured is connected between the signal conductors or among the signal conductors and the ground conductors, and electrical characteristics are measured. The error factors of the measurement system are removed from the measured values, thereby obtaining true values of the electrical characteristics of the electronic device to be measured. Accordingly, a highly accurate high-frequency electrical characteristic measuring method that is not affected by connection variations can be implemented.