Engineering induced tunable electrostatic effect

摘要

Backside illuminated sensors and methods of manufacture are described. Specifically, a backside illuminated sensor with a dipole modulating layer near the photodiode is described.

主权项

1. A method of forming a device, the method comprising:
forming a photodiode on a surface adjacent to and in electrical communication with a gate electrode, the photodiode formed in an insulating layer on the surface; forming an oxide layer having a thickness on the insulating layer; and depositing an insulator having a thickness on the oxide layer, the insulator comprising a dipole modulating layer having a thickness greater than about 10 Å and a fixed charge layer.