| 摘要 |
PROBLEM TO BE SOLVED: To correct a detection error in edge detection from an image measuring instrument.SOLUTION: An edge detection deviation correction value calculation method causes an image measuring instrument to measure a distance between a pair of edges of which directions of light-dark change are reverse in a scanning direction and which face to each other, and calculates a deviation correction value on the basis of the difference between a measurement value and a true value. The edge detection deviation correction value calculation method calculates, with the deviation correction value, a detection point correction value that is a correction value in each direction at an edge detection point detected by scanning an object to be measured by the image measuring instrument, specifies a correction amount used in correction of the edge detection point on the basis of the detection point correction value in each direction, and corrects the edge detection point with the correction amount.SELECTED DRAWING: Figure 6 |
