Silicon-on-insulator microchannels for biological sensors

摘要

Novel methods to fabricate biological sensors and electronics are disclosed. A silicon-on-insulator wafer can be employed by etching a pattern of holes in the silicon layer, then a pattern of cavities in the insulating layer, and then sealing the top of the cavities. Further, n or p doped regions and metallic regions can be defined in the processed wafer, thereby enabling integration of biological sensing and electronic capabilities in the same wafer.

主权项

1. A method comprising:
providing a silicon-on-insulator wafer, comprising a first silicon layer, an insulating layer, and a second silicon layer; defining a pattern of holes in the first silicon layer reaching through to the insulating layer; defining cavities in the insulating layer at locations corresponding to the holes of the pattern of holes, wherein each cavity respectively has only a single hole; and depositing a material on top of the cavities or oxidizing the first silicon layer, thereby sealing the top of the cavities and leaving remaining portions of the cavities intact, wherein a top horizontal surface of the material or oxidized first silicon layer is substantially coplanar with a top horizontal surface of the first silicon layer.