| 摘要 |
<p>A calibration instrument (100) for calibrating a temperature probe (40, 50), such as pyrometer, uses a stable light source (115), such as a light emitting diode, to simulate a blackbody of a known temperature. The light source (115) is located inside a chamber and emits light through an aperture (110). The calibration instrument (100) may be inserted into a thermal processing chamber, or the temperature probe may be removed from the chamber. An alignment tool (149) aligns the aperture (110) to the input of the temperature probe (40, 50). The calibration instrument may be integrated with the alignment tool, or it may be removable. <IMAGE></p> |
