Method for analyzing solid specimen and apparatus therefor

摘要

A method for analyzing a solid specimen comprises the steps of: preparing a pulsed laser beam having a frequency of at least 100 Hz and a half width of 1 mu sec or less; determining a laser irradiation region; irradiating the pulsed laser beam in an inert gas stream and vaporizing a part of the solid specimen to generate fine particles; transferring said fine particles to a detector; and performing elemental analysis in the detector. An apparatus comprises: laser oscillating device including a semiconductor laser; converging device for converging a laser beam; irradiating device for irradiating the converged laser beam to generate fine particles; an analyzer for performing elemental analysis; and transfer device for transferring the fine particles to said analyzer. <IMAGE>