| 摘要 |
A metrology apparatus (100), such as a scanning probe microscope (SPM), has an actuator (104) that controls motion in three orthogonal directions. The X-Y section (220) of the actuator, preferably a piezoelectric actuator, controls motion in the X and Y directions and the Z section (222) of the actuator controls motion in the Z direction. A flexure (232) is attached to the actuator and is mounted on a reference structure (111) to prevent unwanted X and Y motion by the Z section of the actuator. Preferably, two mirrors (240, 242) are mounted on the flexure(232). In operation of the SPM, a light beam is directed towards these mirrors. When the flexure (232) moves in the Z direction, one of the mirrors is deflected and causes the reflected light to move across a detector, generating a signal representative of a change in the Z position of the flexure and the probe. |
