| 摘要 |
PROBLEM TO BE SOLVED: To suppress the production of metal impurities and to stably produce a large flow amount of ozone in a high concentration. SOLUTION: A heat treatment apparatus 1 has an ozone production apparatus 21 and a control section 100. The ozone production apparatus 21 has an ozonator 22 for producing ozone, a raw material gas feeding source 25 connected to the ozonator 22 through a raw material gas feeding pipe 23, and an additive gas feeding source 26 connected to the ozonator 22 through an additive gas feeding pipe 24. In the raw material gas feeding pipe 23 and the additive gas feeding pipe 24, MFC 27 and 28 are provided, respectively. The control section 100 controls the MFC 27 so as to feed the raw material gas to the ozonator 22 in a rate of at least 10 L/min and controls the MFC 28 so as to feed the additive gas in such a rate that the concentration of the additive gas becomes 0.1-200 ppm in the raw material gas fed in a feeding rate of 10 L/min. COPYRIGHT: (C)2005,JPO&NCIPI
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