| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for analyzing the structure of crystal that does not use preliminary information, does not consider information of the super-lattice satellite order, and analyzes the integrity of a super-lattice structure easily and deterministically. SOLUTION: The super-lattice structure crystal formed on a substrate of a predetermined crystal surface is measured by X-ray diffraction, and a plurality of reflective profiles having different plane indices of the super-lattice structure crystal are obtained. In each measured reflective profile, a plurality of satellite peaks with different satellite order observed in the reflective profile are overlapped while the vertices of the satellite peaks are aligned, expansion shapes of the satellite peaks are compared with each other, it is determined whether all of the satellite peaks of respective reflective profiles have the same expansion shape regardless of the satellite order, and the integrity of the super-lattice structure is recognized. COPYRIGHT: (C)2006,JPO&NCIPI
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