| 摘要 |
PROBLEM TO BE SOLVED: To provide a displacement detection method and system, a displacement detecting/adjusting system, an inclination detecting/adjusting system, and a method and a system of adjusting the position of an object which can detect the displacement and inclination of an object, such as an optical element, using an image processing method at a high speed and efficiently. SOLUTION: On the basis of the light and shade of an image obtained by observing position standard marks 111, 121 formed on an object to be adjusted 110 and adjustment member 120, respectively, by an optical observation apparatus 100 as an image, the amount of displacement and/or the direction of displacement of the position standard marks 111, 121 are detected. The amount of displacement is calculated, on the basis of position difference between observed two feature points, the size of an area surrounding the two feature points, or the like. By the detection of the two feature points, inclination of the object can also be detected. COPYRIGHT: (C)2006,JPO&NCIPI
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