| 摘要 |
PROBLEM TO BE SOLVED: To make a thin-film inspection operable by incorporating it into a manufacturing process of coating articles, without pulling articles out from a manufacturing line. SOLUTION: The X-ray thin film-inspecting device is equipped with a specimen table 10 arranging test objects, a positioning mechanism 20 moving over the specimen table 10, a goniometer 30 equipped with a first and a second rotating arms 32 and 33, an X-ray irradiating unit 40 that is mounted on the first rotary arm 31 and has built-in X-ray tubes and X-ray optical elements inside a shielding tube, an X-ray detector 50 mounted on the second rotating arm 33, and an optical camera 70 implementing image recognition of the test objects arranged on the specimen table 10. COPYRIGHT: (C)2006,JPO&NCIPI
|
