| 摘要 |
PROBLEM TO BE SOLVED: To provide a 3-dimensional shape measurement apparatus and a method of the same, capable of precisely measuring the 3-dimensional shape of a measuring object. SOLUTION: A pair of probes 20a and 20b are arranged, such that their tips are opposite in a line with prescribed interval. The surface and the rear face of the measurement object 1 are positioned so as to face a pair of probes, respectively. After that, the relative position of the measurement object 1 between the pair of probes is moved, while sliding by making the Z component of the gravity of the mass body, such as a probe-fixing member 20, the probes 20a and 20b driving force, without changing the mutual positional relation of the pair of probes 20a and 20b. The 3-dimensional shape of the surface of the object 1 is measured by either probe, then the 3-dimensional shape of the rear face of the object 1 is measured by the other probe. COPYRIGHT: (C)2007,JPO&INPIT
|
