| 摘要 |
PROBLEM TO BE SOLVED: To enhance the degassing effect of an inner electrode of a measurement tube and that of a measurement-tube inner wall in a triode-type hot cathode ionization vacuum gauge. SOLUTION: In this triode-type hot cathode ionization vacuum gauge, an ion collector electrode 7 is given a helical shape to connect both ends of the electrode to lead-in terminals 12 and 13. Electric power is supplied to a lead-in electrode to heat the ion collector electrode. COPYRIGHT: (C)2007,JPO&INPIT
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