| 摘要 |
PROBLEM TO BE SOLVED: To detect a flaw, without being limited by the current path of a sample. SOLUTION: After a sample is heated from its back side by a heating source, the sample is allowed to stand for a predetermined time, and the temperature distribution formed on the sample is observed from the back side of the sample by an observation part for detecting the presence of the flaw of the sample. COPYRIGHT: (C)2007,JPO&INPIT
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