| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface inspecting technique for suppressing misdetections of flaws, while using illumination that causes sneaking in of irradiation light generated from all directions is used, with respect to the flaw existing on the surface to be inspected. SOLUTION: In this inspection device of a surface flaw, having a flaw evaluating means 6 for evaluating the output signal of an imaging camera 4 with respect to the surface to be inspected illuminated with the irradiation light due to an illumination part constituted of a plurality of light-emitting elements to detect the flaw on the surface to be inspected, the flaw-evaluating means 6 is equipped with a pre-processing part 60A at least once performing flaw-emphasizing processing for applying smoothing processing to the image data formed from the output signal, after applying contour emphasizing processing thereto, a light and shade image forming part 60B for forming the light and shade image of the surface to be inspected from the image data outputted from the pre-processing part and a flaw-determining part 60C for detecting the flaw from the light and shade image outputted from the light and shade image forming part. COPYRIGHT: (C)2007,JPO&INPIT
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