Energy-saving silencer assembly, a semiconductor manufacturing vacuum pump with same and method for heating nitrogen gas

摘要

The disclosure relates to an energy-saving silencer assembly, which includes: a silencer connected to a discharge side of a pump section, which pumps reaction by-product gas into a vacuum pump, so as to pass the pumped reaction by-product gas from a rear end portion to a front end portion; an outer pipe surrounding the outer peripheral surface of the silencer at an interval so as to provide a heating space between the silencer and the outer pipe; a nitrogen gas supply section for supplying nitrogen gas to the heating space; and a nitrogen gas injection section for injecting heated nitrogen gas to the inside of the silencer by the contact with the outer peripheral surface of the silencer in the heating space.

主权项

1. A silencer assembly of a semiconductor manufacturing vacuum pump for removing noise of byproduct gas pumped in the vacuum pump, the silencer assembly comprising:
a silencer connected to a discharge side of a pump section for pumping byproduct gas in the vacuum pump and making the pumped byproduct gas pass through from a first end portion connected to the discharge side to a second end portion being positioned opposite to the first end portion; an outer pipe surrounding an outer peripheral surface of the silencer with a spacing therebetween to provide a heating space formed between the outer peripheral surface of the silencer and the outer pipe, the heating space directly contacting with the outer peripheral surface of the silencer and including a first inlet through which nitrogen gas is inserted into the heating space and a first outlet through which the nitrogen gas is discharged from the heating space, wherein the first inlet is positioned adjacent to the second end portion of the silencer and the first outlet is positioned adjacent to the first end portion of the silencer such that the nitrogen gas flowing from the first inlet to the first outlet through the heating space is heated by a first heat exchange through the outer peripheral surface of the silencer with the pumped byproduct gas passing through the silencer; a guide wire wound in a spiral directly on and around the outer peripheral surface of the silencer in the heating space such that the nitrogen gas inserted into the heating space through the first inlet moves on the outer peripheral surface of the silencer along the guide wire toward the first outlet; a nitrogen gas supply section for supplying nitrogen gas to the heating space, the nitrogen gas supply section including a preheating pipe installed on the outer pipe along a lengthwise direction of the outer pipe from the first end portion to the second end portion, the preheating pipe including a second inlet through which the nitrogen gas is inserted into the preheating pipe and a second outlet through which the nitrogen gas is discharged from the preheating pipe toward the first inlet of the outer pipe, wherein the second inlet is positioned adjacent to the first end portion of the silencer and the second outlet is positioned adjacent to the second end portion of the silencer to communicate with the first inlet of the outer pipe such that the nitrogen gas flowing from the second inlet to the second outlet through the preheating pipe is heated by a second heat exchange through the outer pipe with the nitrogen gas flowing through the heating space in the outer pipe; and a nitrogen gas injection section installed adjacent to the first end portion of the silencer for injecting into the silencer the nitrogen gas heated by the first and second heat exchanges and then received from the first outlet of the outer pipe.