| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid spray head comprising a piezoelectric element which allows an insulator film to be thinned while controlling a crystal property of a piezoelectric body layer.SOLUTION: The liquid spray head has a piezoelectric element 300 arranged on a flow path forming substrate 10, applies pressure to liquid filled into a pressure generating chamber 12 by displacement of a vibration film 50 caused by driving the piezoelectric element 300 so as to discharge the liquid from a nozzle opening 21 through the nozzle opening 21. The piezoelectric element 300 has: an insulator film 55 to be formed on the vibration film 50; a first electrode film 60 to be formed on the insulator film 55; a piezoelectric body layer 70 to be formed on the first electrode film 60; and a second electrode film 80 to be formed on the piezoelectric body layer 70. Further, the insulator film 55 has a lower insulator film formed on the vibration film 50 and an upper insulator film, formed on the lower insulator film, which is made of the same material as the lower insulator film and has a crystal structure different from the lower insulator film.SELECTED DRAWING: Figure 1 |
