PHOTODETECTOR, MANUFACTURING METHOD THEREOF, RADIATION DETECTOR AND RADIATION DETECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide: a photodetector in which a black resist can be used as a light-shielding material and the deterioration in reliability thereof can be suppressed even when metal is used; a manufacturing method of a radiation detector; and a radiation detection device.SOLUTION: A plurality of photodetection cells 20, each of which comprises an APD (avalanche photodiode), are provided on a surface of a silicon substrate 12. A first terminal of each of the photodetection cells 20 is connected to a TSV (Through Silicon Via) electrode 50 formed to an opening on a rear face side of the silicon substrate 12 via a wiring 40b, and a second terminal thereof is connected to a rear surface electrode 60. A light-shielding groove 30a is provided so as to penetrate through the silicon substrate 12 and surround each photo detection cell 20, and a light-shielding member 30b formed of a black resist or metal is filled in the light-shielding groove.SELECTED DRAWING: Figure 1