摘要 |
PURPOSE: To reduce crosstalk by providing a flexible plane means with first and second through holes and first and second contacting means that have a shield for minimizing electromagnetic interference and is electrically connected to first and second conductors. CONSTITUTION: A film-type testing probe system has a first conductor 14 and a second conductor 25. A plane means 12 is connected to conductors 14 and 25 and has a second surface and first and second through holes 17 and 23 through itself, and the means 12 can be formed flexibly. A shield 16 is connected to the second surface of the means 12 so that it works as an electromagnetic interference minimizing means. A first contacting means 18 contacts a device being tested, essentially buries the first through hole 17, and at the same time protrudes exceeding the second surface and is electrically connected to the conductor 14. A second contacting means 24 contacts a device being tested, essentially buries the second through hole 23, and protrudes exceeding the second surface and is connected to the second conductor 25, thus reducing crosstalk with a signal line on a semiconductor device. |