MANUFACTURE OF VACUUM CHAMBER,申请号JP19950214825-传众专利搜索

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发明名称	MANUFACTURE OF VACUUM CHAMBER
摘要
申请公布号	JPH0957389(A)	申请公布日期	1997.03.04
申请号	JP19950214825	申请日期	1995.08.23
申请人	APPLIED MATERIALS INC	发明人	JINBO TAKESHI
分类号	B23H1/00;B21K23/00;H01L21/02;(IPC1-7):B21K23/00	主分类号	B23H1/00
代理机构		代理人
主权项
地址

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