| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an apparatus for removing contaminants which restrains from growing and also is reduced in cost. <P>SOLUTION: Numeral 50 is an air washer device by which a return air (25°C) from a clean room is introduced. Numeral 51 is a HEPA (high-efficiency particulate air) filter provided at the entrance of the air washer device 50. Numeral 52 is a cold water coil. Numeral 53a to numeral 53c are spray nozzles. Numeral 55 is a supplementary circulation tank, which is divided into a first supplementary circulation tank 55a and a second supplementary circulation tank 55c. The return air, further, passes through an eliminator 54 to remove mist of sprayed water and flows into an air conditioning chamber 60 at a lower temperature of 12°C. Three heat exchangers consist of a spray heat exchanger 58a, a refilling water heat exchanger 58b and a hot water heat exchanger 58c are connected in series and installed. Supply cold water (E) has a temperature of 7°C. Cold water is arranged so as to be used from low temperature to high temperature in high order of energy. A temperature of cold water (G) supplied to the cold water coil 52 is 12°C. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
