| 摘要 |
PROBLEM TO BE SOLVED: To provide a composition of an organic acid metal salt containing a niobium precursor and a lead precursor suitable for a raw material for a MOD (Metal Organic Deposition) method when a thin film containing niobium and lead is manufactured by the MOD method; and a method for manufacturing the thin film using the same. SOLUTION: The composition of the organic acid metal salt comprises: an organic acid-niobium derivative obtained from a 2-18C aliphatic organic acid as a niobium precursor; an organic acid-lead compound expressed by general formula: (RCOO)<SB>2</SB>Pb (wherein, R is 1-17C aliphatic hydrocarbon group) as a lead precursor; and at least a kind of organic solvent. Further, the composition may comprises other arbitrary metal precursors. The method for manufacturing the thin film on the substrate comprises applying the composition of the organic acid metal salt on the substrate and forming the thin film containing niobium element and lead element by heating the applied composition. COPYRIGHT: (C)2007,JPO&INPIT
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