| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive electrode foil for an electrolytic capacitor which is suitable for manufacture of laminated solid electrolytic capacitor, has capacitance density higher than that of an etching Al foil and the electrode resistance same as that of the etching Al foil, and contains reduced quantity of Ta and Nb as expensive rare metals, and to provide a manufacturing method thereof. SOLUTION: An alloy thin film (9) in which Ta or Ta alloy or a heterocomponent incompatible with the Ta are uniformly distributed at a particle size within a range of 1 nm-1μm is formed on a copper alloy (8). A dense layer (10) of Ta or Ta alloy is formed on the obtained alloy thin film (9). The Ta or Ta alloy and the heterocomponent are particle-adjusted by heat treatment. Electric collecting layers (12, 13) made of Al or Al ally are formed on the dense layer (10), and the copper foil and the heterocomponent are removed. Alternatively, Nb or Nb alloy may be used instead of the Ta or Ta alloy. COPYRIGHT: (C)2008,JPO&INPIT
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