Micromechanical component and method for producing a micromechanical component

摘要

A micromechanical component and a method for producing a micromechanical component are described. The component has: a frame; a plate spring that is connected to the frame and that has a front side and a rear side facing away from the front side; a mirror element that is situated on the front side of the plate spring and is connected to the front side of the plate spring in such a way that the mirror element is suspended on the frame so as to be capable of displacement; and at least one piezoelectric strip that is connected to the rear side of the plate spring; the plate spring being elastically deformable through the application of an electrical voltage to the at least one piezoelectric strip in order to displace the mirror element.

主权项

1. A micromechanical device, comprising:
a frame; a plate spring connected to the frame and having a front side and a rear side facing away from the front side; a spacing element; a mirror element situated on the front side of the plate spring and connected to the front side of the plate spring via the spacing element in such a way that the mirror element is suspended on the frame so as to be capable of displacement, wherein the mirror element includes a reflective surface that is situated at a distance from the front side of the plate spring at least by the spacing element; and at least one piezoelectric strip connected to the rear side of the plate spring, wherein the plate spring is elastically deformable through an application of an electrical voltage to the at least one piezoelectric strip in order to displace the mirror element.