发明名称 光学素子の検査方法、及び光学素子の検査装置
摘要 PROBLEM TO BE SOLVED: To inspect irregularity in optical characteristics of an optical element or a defect therein as to the optical element having a polarization filter different in a polarization direction two-dimensionally arranged at a predetermined area ratio at high speed, and to evaluate a quality determination of the optical element with high accuracy.SOLUTION: The inspection method of an optical element having a first polarization area transmitting a first polarization component of incident light and a second polarization area transmitting a second polarization component of the incident light two-dimensionally arranged at a predetermined area ratio is configured to: calculate transmittance of the first polarization component passing through the optical element (S9); calculate transmittance of the second polarization component passing through the optical element (S15); calculate a transmittance ratio from the transmittance of the first polarization component and the transmittance of the second polarization component (S17); and, when an absolute value of a value deducted by a predetermined reference value in accordance with the area ratio from the calculated transmittance ratio falls within a predetermined range, determine that the optical element is non-defective (S19).
申请公布号 JP5983223(B2) 申请公布日期 2016.08.31
申请号 JP20120202712 申请日期 2012.09.14
申请人 株式会社リコー 发明人 守 哲司
分类号 G01M11/00 主分类号 G01M11/00
代理机构 代理人
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