Calculating power input to an array of thermal control elements to achieve a two-dimensional temperature output

摘要

A method for calculating power input to at least one thermal control element of an electrostatic chuck includes: setting the at least one thermal control element to a first predetermined power level; measuring a first temperature of the at least one thermal control element when the at least one thermal control element is powered at the first predetermined power level; setting the at least one thermal control element to a second predetermined power level; measuring a second temperature of the at least one thermal control element when the at least one thermal control element is powered at the second predetermined power level; calculating a difference between the first temperature and the second temperature; calculating a system response of the at least one thermal control element based on the difference; inverting the system response; and calibrating the at least one thermal control element based on the inverted system response.

主权项

1. A method for calculating power input to at least one thermal control element of an electrostatic chuck having an array of independently controllable heater zones, the method comprising:
setting, with a control unit including a processor, the at least one thermal control element in the electrostatic chuck to a first predetermined power level; measuring, with a temperature detector, a first temperature of the at least one thermal control element when the at least one thermal control element is powered at the first predetermined power level; setting, with the processor, the at least one thermal control element to a second predetermined power level; measuring, with the temperature detector, a second temperature of the at least one thermal control element when the at least one thermal control element is powered at the second predetermined power level; calculating a difference between the first temperature and the second temperature that are measured; calculating a system response of the at least one thermal control element based on the difference that is calculated; inverting the system response that is calculated; and calibrating the at least one thermal control element of the electrostatic chuck based on the inverted system response.