Electromagnetic wave high frequency hybrid plasma torch

摘要

The purpose of the present invention is to solve the problems of conventional high frequency plasma torches and develop a plasma torch which enables quick quenching of high frequency plasma and which overcomes instability resulting from the quick quenching. To accomplish the abovementioned objective, according to one embodiment of the present invention, disclosed is an electromagnetic wave high frequency hybrid plasma torch. The electromagnetic wave high frequency hybrid plasma torch may comprise: an electromagnetic wave oscillator for oscillating electromagnetic waves; a power supply unit for supplying power to the electromagnetic wave oscillator; an electromagnetic wave transmission line for transmitting the electromagnetic waves generated by the electromagnetic wave oscillator; a first plasma-forming gas supply unit for injecting a plasma-forming gas; an electromagnetic wave discharge pipe for generating plasma by the electromagnetic waves introduced from the electromagnetic wave transmission line and the plasma-forming gas injected by the first plasma-forming gas supply unit; a high frequency discharge pipe for introducing an electromagnetic wave plasma flow from the electromagnetic wave discharge pipe; an induction coil structure which is coaxial with the high frequency discharge pipe and which has an interior with an induction coil inserted therein; a cooling water channel for introducing cooling water around the high frequency discharge pipe and discharging the cooling water; and a second plasma-forming gas supply unit for introducing a plasma-forming gas into the high frequency discharge pipe.

主权项

1. An electromagnetic wave/high frequency hybrid plasma torch comprising:
an electromagnetic wave oscillator configured to oscillate electromagnetic waves; a power supply unit configured to supply power to the electromagnetic wave oscillator; an electromagnetic wave transmission line configured to transmit the electromagnetic waves generated at the electromagnetic wave oscillator; a first plasma-forming gas supply unit configured to inject a plasma-forming gas; an electromagnetic wave discharge pipe in which plasma is generated by the electromagnetic waves introduced from the electromagnetic wave transmission line and the plasma-forming gas injected from the first plasma-forming gas supply unit; a high-frequency discharge pipe through which an electromagnetic wave plasma flow is introduced from the electromagnetic wave discharge pipe; a cylindrical induction coil structure which is coaxial with the high-frequency discharge pipe and has an induction coil inserted therein; an outer wall configured to surround the induction coil structure; a cooling water channel through which cooling water is introduced into the high frequency discharge pipe and discharged from the high frequency discharge pipe; a second plasma-forming gas supply unit through which a plasma-forming gas is introduced into the high-frequency discharge pipe; and a reactive gas supply unit configured to inject a reactive gas into the high-frequency discharge pipe,wherein the cooling water channel comprises:
a first ring-shaped cooling water channel present between the outer wall and the induction coil structure; and a second ring-shaped cooling water channel present between the induction coil structure and the high-frequency discharge pipe,wherein the first cooling water channel and the second cooling water channel are connected and isolated from the outside so that cooling water injected into one lateral portion of the cooling water channel circulates along the cooling water channel to be discharged from the other lateral portion of the cooling water channel.