摘要 |
PURPOSE:To improve the durability of the brazing jig made of silicon nitride and to drastically decrease the number derived from maintenance, product defects, etc. CONSTITUTION:This brazing jig made of the sintered body of the silicon nitride has an amorphous grain boundary layer. The ratio between the peak height I520 of silicon appearing at about 520cm-of laser Raman spectra and the peak height I206 of the silicon nitride appearing at about 206cm<-1> is <=1. Further, the toughness of this jig is enhanced and the durability and workability are improved. |