CVD METHOD AND DEVICE THEREFOR,申请号JP19920160072-传众专利搜索

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发明名称	CVD METHOD AND DEVICE THEREFOR
摘要
申请公布号	JPH05331647(A)	申请公布日期	1993.12.14
申请号	JP19920160072	申请日期	1992.05.28
申请人	ANELVA CORP	发明人	FUKAGAWA WATARU
分类号	C23C16/34;C23C16/46;(IPC1-7):C23C16/46	主分类号	C23C16/34
代理机构		代理人
主权项
地址

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