| 摘要 |
PURPOSE:To efficiently produce a material wherein superfine particles are not aggregated and the superfine particles having a uniform diameter are concentratedly dispersed by heating and vaporizing a material as the raw material for the superfine particle with a laser beam in the atmosphere kept at a specified vacuum. CONSTITUTION:A CdTe superfine particle-dispersed SiO2 glass, for example, is produced as follows. Namely, the material is irradiated with a YAG laser pulse by 45 shots, for example, in an oxygen atmosphere at 5X10<-4>Torr in the first stage to form an SiO2 glass film having 11.25nm thickness, for example, on a quartz substrate. The vacuum chamber is then controlled to 1X10<-6>Torr in the second stage, and the CdTe polycrystal wafer is irradiated with a laser pulse by 50 shots, for example, to deposit the CdTe fine particles on the Sin. glass film produced in the first stage. The first and second stages are repeated 80 times, for example, and a CdTe superfine particle-dispersed glass having about 1mum film thickness is produced.
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