Process for the separation of a gaseous hydride or a mixture of gaseous hydrides with the aid of a membrane

摘要

The invention relates to a process for the separation of silane from a gas mixture containing at least one gas from the group consisting of Ar and He, according to which the gas mixture is passed into a membrane module (6), so as to obtain, at the outlet of the module, a silane concentration which is greater than the initial silane concentration in the gas mixture.