发明名称 |
Method of forming a film having enhanced reflow characteristics at low thermal budget |
摘要 |
A method of forming a film having enhanced reflow characteristics at low thermal budget is disclosed, in which a surface layer of material is formed above a base layer of material, the surface layer having a lower melting point than the base layer. In this way, a composite film having two layers is created. After reflow, the surface layer can be removed using conventional methods.
|
申请公布号 |
US6150029(A) |
申请公布日期 |
2000.11.21 |
申请号 |
US19970937331 |
申请日期 |
1997.09.05 |
申请人 |
MICRON TECHNOLOGY, INC. |
发明人 |
SANDHU, GURTEJ;THAKUR, RANDHIR P. S. |
分类号 |
H01L21/3105;H01L21/316;(IPC1-7):B32B9/00;B32B17/06 |
主分类号 |
H01L21/3105 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|