发明名称 |
MICRO PARALLEL KINEMATIC MECHANISM DESIGN AND FABRICATION |
摘要 |
A planar micro parallel-link mechanism that provides fine planar motion to a platform in two translation directions and one rotation direction using comb-drive actuators with gear chain systems coupled to rack-and-pinions and struts. The micro parallel-link mechanism has a large operating envelope and can be fabricated using surface micromachining techniques. The kinematic and dynamic analyses of the micro parallel-link mechanism are integrated with closed-loop control system to monitor and supervise the position and velocity of the micro mechanism with three degree-of freedom motions. Methods of depositing and building miniaturized tools and parts on the platform are also disclosed to provide the basic building block for a number of products applicable for nano technology, sensor, actuators, and biotechnology applications. |
申请公布号 |
WO2004081991(A2) |
申请公布日期 |
2004.09.23 |
申请号 |
WO2004US07578 |
申请日期 |
2004.03.11 |
申请人 |
THE ARIZONA BOARD OF REGENTS;MOU, JONG-I;CHIN, CHI-TE |
发明人 |
MOU, JONG-I;CHIN, CHI-TE |
分类号 |
B81B5/00;H01L;H02K7/00;H02N1/00 |
主分类号 |
B81B5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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