发明名称 MEMBRANE SENSOR
摘要 The invention relates to a micromechanical sensor and to a method for producing a micromechanical sensor that has at least one membrane. The membrane is made of a first material whereby, in order to sense a medium surrounding it, this membrane is accommodated in a second material. The invention is characterized in that the membrane is reinforced, at least in part, by a third material at breakable locations on membrane edge. Reinforcement of the membrane edge increases the stability and thus the serviceable life of the membrane and of the sensor.
申请公布号 WO2004080885(A2) 申请公布日期 2004.09.23
申请号 WO2004DE00295 申请日期 2004.02.18
申请人 ROBERT BOSCH GMBH;MUELLER-FIEDLER, ROLAND;HECHT, HANS;MUCHOW, JOERG;FUERTSCH, MATTHIAS;STRATMANN, ANDREAS;WEBER, HERIBERT;BERNHARD, WINFRIED;GRUEN, DETLEF;DUELL, ANDREAS;SCHINK, RAINER;WAGNER, ULRICH;SCHELLING, CHRISTOPH 发明人 MUELLER-FIEDLER, ROLAND;HECHT, HANS;MUCHOW, JOERG;FUERTSCH, MATTHIAS;STRATMANN, ANDREAS;WEBER, HERIBERT;BERNHARD, WINFRIED;GRUEN, DETLEF;DUELL, ANDREAS;SCHINK, RAINER;WAGNER, ULRICH;SCHELLING, CHRISTOPH
分类号 G01F1/684;G01L9/00;G01N7/10 主分类号 G01F1/684
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