HOLDER FOR SEMICONDUCTOR OR LIQUID CRYSTAL PRODUCTION SYSTEM AND SEMICONDUCTOR OR LIQUID CRYSTAL PRODUCTION SYSTEM MOUNTING IT

摘要

PROBLEM TO BE SOLVED: To provide a holder for a semiconductor or liquid crystal production system in which soaking properties are enhanced on the surface for holding an article to be processed, and to provide a semiconductor or liquid crystal production system mounting it. SOLUTION: When a structure provided with a holding section principally comprising Si on a ceramics heater is employed, soaking properties are enhanced on the holding surface and generation of particles can be suppressed. Furthermore, durability can be enhanced by coating at least the surface for holding an article to be processed. COPYRIGHT: (C)2005,JPO&NCIPI