| 摘要 |
A processing apparatus, and a system and program for monitoring and controlling a fan filter unit are provided. The processing apparatus includes a mounting unit for mounting a transport container for accommodating therein a plurality of substrates, a processing unit for performing a process on a substrate, a transfer unit having a transfer mechanism for transferring the substrate between the transport container mounted on the mounting unit and the processing unit, a clean air supply unit for supplying a clean air into the transfer unit, a wind velocity measuring unit, and a control unit. The transfer mechanism is provided with a wind velocity measuring unit for measuring a wind velocity of the clean air in the transfer unit.
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