FOCUSED ION BEAM DEVICE, SAMPLE CROSS SECTION MANUFACTURING METHOD, AND FLAKE SAMPLE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a sample cross section manufacturing method capable of efficiently detecting a center position of a defective part or a contact hole by an FIB device without having an SEM observation function. SOLUTION: While executing etching work by scanning and irradiating the vicinity of a sample cross section region with a focused ion beam 1, secondary ions 2 generated by the irradiation of the focused ion beam 1 are detected. The etching work is ended by detecting a work end point by a work end point detection mechanism 16 from a detected secondary electron signal. COPYRIGHT: (C)2008,JPO&INPIT