| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring method by scanning confocal laser microscope capable of capturing a picture by appropriately judging a capturing range of the picture even when there are a plurality of pattern parts having different heights. SOLUTION: In the measuring method by scanning type confocal laser microscope, a surface configuration of a sample is measured by using the scanning type confocal laser microscope which captures a two-dimensional picture of the surface configuration of the sample by irradiating the sample with a laser beam and receiving reflection light by a light receiving part while relatively changing a distance between a sample-loading stage and an objective lens in the optical axis direction. Therein, a plurality of kinds of positional information in the optical axis direction being information relating to a first position arbitrarily selected contained in the surface configuration in the optical axis direction are registered, based on the positional information in the optical axis direction, the capturing range in the optical axis direction for capturing the surface configuration of the sample as the two-dimensional picture is calculated, based on the capturing range, the two-dimensional picture is captured and, thereby, the above-mentioned problem can be solved. COPYRIGHT: (C)2008,JPO&INPIT
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