ASHING DEVICE FOR FLAT DISPLAY PANEL DEVICE

摘要

An ashing device for a flat display panel device is provided to remove a contamination problem during a wet ashing process and reduce damage of a circuit wire except a masking material while simultaneously processing a large area. A heating unit(201) heats up to the temperature of 50~300 °C. A substrate(204) is preheated before an ashing process by microwave plasma through heating. Damage of a substrate is minimized by heat impact by preventing rapid heat expansion of the substrate through preheating of the substrate because a microwave plasma torch(205) is instant high temperature heating. An ashing speed increases when ashing the substrate through heating. A heating temperature of the substrate is determined by a decomposition temperature of a corresponding material. In an ashing apparatus(202), the substrate is heated by upper pressure microwave plasma(106).